SMC Corporation of America XLJ Series

SMC Pneumatics XLJ Series high vacuum angle valve provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.


  • Compatible with inert gases
  • Flange sizes: 25 and 40
  • Operating pressure range: Atmospheric to 0.01 Pa
  • Operating temperature: 5-40°C
  • Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VD

SMC Corporation of America XLJ Series Datasheets

SMC Corporation of America Technical Datasheets