SMC Pneumatics XLJ Series high vacuum angle valve provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Compatible with inert gases
- Flange sizes: 25 and 40
- Operating pressure range: Atmospheric to 0.01 Pa
- Operating temperature: 5-40°C
- Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VD
SMC Corporation of America XLJ Series Datasheets